239000006143 cell culture media Substances 0.000 abstract description 2.OC()=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 abstract description 3 UIIMBOGNXHQVGW-UHFFFAOYSA-M buffer Substances.238000000708 deep reactive-ion etching Methods 0.000 claims description 2.

229910052796 boron Inorganic materials 0.000 claims description 2.ZOXJGFHDIHLPTG-UHFFFAOYSA-N boron Chemical compound ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2.229910052785 arsenic Inorganic materials 0.000 claims description 2.RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic Chemical compound RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 2.238000004519 manufacturing process Methods 0.000 claims description 3.229920005591 polysilicon Polymers 0.000 claims description 4.229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4.238000002513 implantation Methods 0.000 claims description 4.239000010703 silicon Substances 0.000 claims description 8.229910052710 silicon Inorganic materials 0.000 claims description 8.XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8.229920002120 photoresistant polymer Polymers 0.000 claims description 11.230000005684 electric field Effects 0.000 claims abstract description 31.230000005693 optoelectronics Effects 0.000 title claims abstract description 22.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from US90845207P external-priority Application filed by The Regents Of The University Of California filed Critical The Regents Of The University Of California Publication of WO2008119066A1 publication Critical patent/WO2008119066A1/en Priority to US12/565,984 priority Critical patent/US7956339B2/en Links Neale Original Assignee The Regents Of The University Of California Priority date (The priority date is an assumption and is not a legal conclusion. Inventor Aaron Ohta Pei-Yu Chiou Hsan-Yin Hsu Arash Jamshidi Ming-Chiang Wu Steven L. Google Patents WO2008119066A1 - Single-sided lateral-field and phototransistor-based optoelectronic tweezers WO2008119066A1 - Single-sided lateral-field and phototransistor-based optoelectronic tweezers

Photo transistor cross reference